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Phase light modulator (PLM) by MEMS mirror array operating in a piston-mode motion enables a high-speed diffractive beam steering in a random-access and flexible manner that makes a lidar system more intelligent and adaptive. Diffraction efficiency is determined by the range of the piston motion of the MEMS array; consequently, a larger range of the piston motion is required for beam steering in infrared, such as for lidar. We demonstrated how the range of the piston motion is optically enhanced by a factor of two with a light-recycling optics based on Talbot self-imaging. The proposed optical architecture extends the usable range of the wavelength so that a MEMS-PLM designed for visible wavelength is applicable for a high-efficiency beam steering at an infrared wavelength of 1550 nm with an improved diffraction efficiency of 30%.

Optical Enhancement of Diffraction Efficiency of Texas Instruments Phase Light Modulator for Beam Steering in Near Infrared