Open AccessA MONOLITHIC EWOD CHIP BY SURFACE MICROMACHINING
Author(s) -
Wyatt C. Nelson,
C.J. Kim
Publication year - 2010
Publication title -
2010 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.43
Subject(s) - surface micromachining , chip , materials science , bulk micromachining , surface (topology) , optoelectronics , engineering , electrical engineering , fabrication , geometry , medicine , alternative medicine , mathematics , pathology