Open AccessA MONOLITHIC EWOD CHIP BY SURFACE MICROMACHINING
Author(s) -
Wyatt C. Nelson,
C.J. Kim
Publication year - 2010
Publication title -
1998 solid-state, actuators, and microsystems workshop technical digest
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.31438/trf.hh2010.43
Subject(s) - surface micromachining , electrowetting , materials science , fabrication , chip , bulk micromachining , microfluidics , optoelectronics , dielectric , nanotechnology , electrical engineering , engineering , medicine , alternative medicine , pathology