Open AccessФормирование кластеров La-=SUB=-0.7-=/SUB=-Sr-=SUB=-0.3-=/SUB=-MnO-=SUB=-3-=/SUB=- в магнетронной плазме при воздействии ионно-звуковой волны на поток частиц
Author(s) -
В.Д. Окунев,
З.А. Самойленко,
Ю.М. Николаенко,
Т.А. Дьяченко,
А.С. Корнеевец,
Е.И. Пушенко
Publication year - 2019
Publication title -
письма в журнал технической физики
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2020.01.48865.18044
Subject(s) - amorphous solid , ion , plasma , manganese , substrate (aquarium) , deposition (geology) , materials science , sputter deposition , sputtering , modulation (music) , kinetics , cavity magnetron , mineralogy , analytical chemistry (journal) , chemical physics , metallurgy , chemistry , thin film , crystallography , nanotechnology , physics , geology , acoustics , environmental chemistry , nuclear physics , oceanography , sediment , paleontology , quantum mechanics , organic chemistry
The kinetics of formation of the clusters in magnetron plasma during the motion of a particle flow obtained by sputtering of La0.7Sr0.3MnO3 target followed by the deposition of clusterized amorphous layers on an extended glass substrate was studied. The effect of ion-acoustic wave on the spatial modulation of local structure and properties of clusterized medium at the presence of multivalent manganese ions in the plasma is revealed.
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