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New applications for LTPS array technology including lab‐on‐chip and MEMS actuators
Author(s) -
Young Nigel D.,
Fish David A.,
Ponjée Marc W. G.,
Trainor Michael J.
Publication year - 2010
Publication title -
journal of the society for information display
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.578
H-Index - 52
eISSN - 1938-3657
pISSN - 1071-0922
DOI - 10.1889/jsid18.8.558
Subject(s) - microelectromechanical systems , actuator , chip , lab on a chip , computer science , photodetector , materials science , computer hardware , optoelectronics , microfluidics , nanotechnology , artificial intelligence , telecommunications
Abstract— The use of low‐temperature poly‐Si technology for new applications beyond displays is presented. These applications include lab‐on‐chip, MEMS actuators, and sensors. As a key example, the use of high‐voltage poly‐Si TFTs for rapid heating and temperature control, as is required for DNA amplification within lab‐on‐chip, is described in detail. Other examples given include MEMS ink‐jet printer heads and the formation of photosensors and impedance sensors for optical and electronic input, which can be used not only in displays and lab‐on‐chip, but also for new applications such as fingerprint sensing and particle counting.