Open AccessEFFECT OF SUBSTRATE TEMPERATURE ON STRUCTURAL, OPTICAL AND ELECTRICAL PROPERTIES OF AL-DOPED ZINC OXIDE THIN FILMS DEPOSITED BY LAYER-BY-LAYER METHOD AT MAGNETRON SPUTTERING
Author(s) -
M.V. Dranchuk,
А. І. Євтушенко,
В. А. Карпина,
Оксана Степанівна Литвин,
Volodymyr R. Romaniuk,
V. Tkach,
В. А. Батурин,
Olexander Karpenko,
В. М. Кузнецов,
В. І. Попович,
Mykhailo Dusheiko,
Г. В. Лашкарьов
Publication year - 2015
Publication title -
sensorna elektronìka ì mìkrosistemnì tehnologìï
Language(s) - English
Resource type - Journals
eISSN - 2415-3508
pISSN - 1815-7459
DOI - 10.18524/1815-7459.2015.1.104305
Subject(s) - wurtzite crystal structure , materials science , substrate (aquarium) , sputter deposition , thin film , layer (electronics) , doping , crystallite , band gap , analytical chemistry (journal) , electrical resistivity and conductivity , optoelectronics , sputtering , zinc , composite material , nanotechnology , metallurgy , chemistry , oceanography , chromatography , geology , engineering , electrical engineering