Open AccessCooling Performance of Air/Water Mist Jet Impinging for a Rapid Thermal Annealing System
Author(s) -
Jun Kyoung Lee
Publication year - 2015
Publication title -
han'gug gi'gye ga'gong haghoeji/han-guk gigye gagong hakoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-0771
pISSN - 1598-6721
DOI - 10.14775/ksmpe.2015.14.5.068
Subject(s) - mist , materials science , mechanics , thermal , jet (fluid) , composite material , thermodynamics , meteorology , physics