Open AccessIntegrated ARROW waveguides with hollow cores
Author(s) -
Dongmei Yin,
Holger Schmidt,
John P. Barber,
Aaron R. Hawkins
Publication year - 2004
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/opex.12.002710
Subject(s) - fabrication , optics , materials science , waveguide , silicon nitride , silicon , optoelectronics , transverse mode , polyimide , core (optical fiber) , nanotechnology , layer (electronics) , physics , laser , medicine , alternative medicine , pathology
We report the design, fabrication, and demonstration of antiresonant reflecting optical (ARROW) waveguides with hollow cores. We describe the design principles to achieve low waveguide loss in both transverse and lateral directions. A novel fabrication process using silicon dioxide and silicon nitride layers as well as sacrificial polyimide core layers was developed. Optical characterization of 3.5mum thick waveguides with air cores was carried out. We demonstrate single-mode propagation through these hollow ARROW waveguides with propagation loss as low as 6.5cm-1 and mode cross sections down to 6.7mum2. Applications of these waveguides to sensing and quantum communication are discussed.