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An ultra-narrow slot waveguide is fabricated for use in highly-efficient,electro-optic-polymer-based, integrated-optic modulators. Measurement resultsindicate that $V_\pi L$'s below 1.2 V.mm are possible for balanced Mach-Zehndermodulators using this ultra-narrow slot waveguide on a silicon-organic hybridplatform. Simulated $V_\pi L$'s of 0.35 V.mm have also been obtained. Inaddition to adapting standard recipes, we developed two novel fabricationprocesses for achieving miniaturized devices with high modulation sensitivity.To boost compactness and decrease the overall footprint, we use a fabricationapproach based on air bridge interconnects on thick, thermally-reflowed, MaN2410 E-beam resist protected by an alumina layer. To overcome the challenges ofhigh currents and imperfect infiltration of polymers into ultra-narrow slots,we use a carefully designed, atomically-thin layer of TiO$_2$ as acarrier-barrier to enhance the polling efficiency of our electro-opticpolymers. Additionally, finite-difference time-domain simulations are employedto optimize the effect of the thin layer of TiO$_2$. As compared to other,non-optimized, cases, our peak measured current is reduced by a factor of 3;scanning electron microscopy images also demonstrate that we achieve almostperfect infiltration. The anticipated increase in total capacitance due to theTiO$_2$ layer is shown to be negligible. In fact, applying our TiO$_2$ surfacetreatment to our ultra-narrow slot, allows us to obtain an improved phase shiftefficiency ($\partial n / \partial V$) of $\sim$94% for a 10 nm TiO$_2$ layer.

Enhanced Polling and Infiltration for Highly-Efficient Electro-Optic Polymer-Based Mach-Zehnder Modulators