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We demonstrate power-efficient, thermo-optic, silicon nitride waveguide phaseshifters for blue, green, and yellow wavelengths. The phase shifters operatedwith low power consumption due to a suspended structure and multi-passwaveguide design. The devices were fabricated on 200-mm silicon wafers usingdeep ultraviolet lithography as part of an active visible-light integratedphotonics platform. The measured power consumption to achieve a $\pi$ phaseshift (averaged over multiple devices) was 0.78, 0.93, 1.09, and 1.20 mW atwavelengths of 445, 488, 532, and 561 nm, respectively. The phase shifters wereintegrated into Mach-Zehnder interferometer switches, and $10- 90$\% rise(fall)times of about 570(590) $\mu$s were measured.

Power-Efficient Silicon Nitride Thermo-Optic Phase Shifters for Visible Light