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Aluminum nitride (AlN) is an emerging material for integrated quantumphotonics due to its large $\chi^{(2)}$ nonlinearity. Here we demonstrate thehybrid integration of AlN on silicon nitride (SiN) photonic chips. Compositemicrorings are fabricated by reactive DC sputtering of c-axis oriented AlN ontop of pre-patterned SiN. This new approach does not require any patterning ofAlN and depends only on reliable SiN nanofabrication. This simplifies thenanofabrication process drastically. Optical characteristics, such as thequality factor, propagation losses and group index, are obtained. Our hybridresonators can have a one order of magnitude increase in quality factor afterthe AlN integration, with propagation losses down to \SI{0.7}{dB/cm}. Usingfinite-element simulations, phase matching in these waveguides is explored.

Aluminum nitride integration on silicon nitride photonic circuits: a new hybrid approach towards on-chip nonlinear optics