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Shack-Hartmann wavefront sensors (SHWS) are generally used to measure thewavefront curvature of light beams. Measurement accuracy and the sensitivity ofthese sensors are important factors for better wavefront sensing. In thisstudy, we demonstrate a new type of SHWS with better measurement accuracy thanthe regular SHWS. The lenslet array in the regular SHWS is replaced with anarray of coded phase masks and the principle of coded aperture correlationholography (COACH) is used for wavefront reconstruction. Sharper correlationpeaks achieved by COACH improve the accuracy of the estimated local slopes ofthe measured wavefront and consequently improve the reconstruction accuracy ofthe overall wavefront. Experimental results confirm that the proposed methodprovides a lower mean square wavefront error by one order of magnitude incomparison to the regular SHWS.

Shack Hartmann wavefront sensor with array of phase coded masks