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We report on compact and efficient silicon-organic hybrid (SOH) Mach-Zehndermodulators (MZM) with low phase shifter insertion loss of 0.7 dB. The 280$\mu$m-long phase shifters feature a $\pi$-voltage-length product of 0.41 Vmmand a loss-efficiency product as small as $aU_{\pi}L = 1.0\space\rm{VdB}$. Thedevice performance is demonstrated in a data transmission experiment, where wegenerate on-off-keying (OOK) and four-level pulse-amplitude modulation (PAM4)signals at symbol rates of 100 GBd, resulting in line rates of up to 200Gbit/s. Bit error ratios are below the threshold for hard-decision forwarderror correction (HD-FEC) with 7 % coding overhead, leading to net data ratesof 187 Gbit/s. This is the highest PAM4 data rate ever achieved for a sub-1 mmsilicon photonic MZM.

Silicon-Organic Hybrid (SOH) Mach-Zehnder Modulators for 100 GBd PAM4 Signaling With Sub-1 dB Phase-Shifter Loss