Open AccessPtychography with multiple wavelength illumination
Author(s) -
Xukang Wei,
Paul Urbach
Publication year - 2019
Publication title -
optics express
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.27.036767
Subject(s) - ptychography , optics , phase retrieval , monochromatic color , extreme ultraviolet lithography , physics , extreme ultraviolet , wavelength , transmission (telecommunications) , multiplexing , point spread function , amplitude , fourier transform , computer science , diffraction , telecommunications , laser , quantum mechanics
For performing phase retrieval in the extreme ultraviolet (EUV) regime more efficiently, developing polychromatic ptychography is desirable. As an alternative to the existing ptychographic information multiplexing (PIM) method, we present an another scheme where all monochromatic exit waves are expressed in terms of the amplitude of the transmission function and the thickness function of the object. Our proposed algorithm is a gradient based method and its validity is studied numerically. In addition, the sampling issue which appears in the polychromatic ptychography scheme and its influence to the reconstruction quality are discussed.