Fabrication and characterization of suspended SiO_2 ridge optical waveguides and the devices | Zendy

Pengxin Chen | Zendy; Yunpeng Zhu | Zendy; Yao Shi | Zendy; Daoxin Dai | Zendy; Sailing He | Zendy

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Fabrication and characterization of suspended SiO_2 ridge optical waveguides and the devices

Author(s) -

Pengxin Chen,

Yunpeng Zhu,

Yao Shi,

Daoxin Dai,

Sailing He

Publication year - 2012

Publication title -

optics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.394

H-Index - 271

ISSN - 1094-4087

DOI - 10.1364/oe.20.022531

Subject(s) - materials science , bend radius , optics , ridge , wavelength , fabrication , silicon , radius , waveguide , resonator , core (optical fiber) , refractive index , optoelectronics , bending , composite material , geology , medicine , paleontology , physics , alternative medicine , computer security , pathology , computer science

Novel suspended SiO(2) ridge optical waveguides on silicon are fabricated and characterized. The present suspended SiO(2) ridge optical waveguide has a SiO(2) ridge core surrounded by air. The propagation loss and the bend loss measured are about 0.385dB/cm and 0.037dB/90° respectively for the fabricated 1 μm-wide waveguides with a bending radius of 100 μm when operating at the wavelength of 1550 nm. With the present suspended SiO(2) optical waveguides, a small racetrack resonator with a radius of 100 μm is also demonstrated and the measured Q-factor is about 3160.

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