Open AccessFabrication and characterization of suspended SiO_2 ridge optical waveguides and the devices
Author(s) -
Pengxin Chen,
Yongxiang Zhu,
Yaocheng Shi,
Daoxin Dai,
Sailing He
Publication year - 2012
Publication title -
optics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.394
H-Index - 271
ISSN - 1094-4087
DOI - 10.1364/oe.20.022531
Subject(s) - materials science , bend radius , optics , ridge , wavelength , fabrication , silicon , radius , waveguide , resonator , core (optical fiber) , refractive index , optoelectronics , bending , composite material , geology , medicine , paleontology , physics , alternative medicine , computer security , pathology , computer science
Novel suspended SiO(2) ridge optical waveguides on silicon are fabricated and characterized. The present suspended SiO(2) ridge optical waveguide has a SiO(2) ridge core surrounded by air. The propagation loss and the bend loss measured are about 0.385dB/cm and 0.037dB/90° respectively for the fabricated 1 μm-wide waveguides with a bending radius of 100 μm when operating at the wavelength of 1550 nm. With the present suspended SiO(2) optical waveguides, a small racetrack resonator with a radius of 100 μm is also demonstrated and the measured Q-factor is about 3160.