Open AccessIon Beam Induced Surface Modification of ta-C Thin Films
Author(s) -
M. Berova,
M. Sandulov,
T. Tsvetkova,
S. Kitova,
L. Bischoff,
R. Boettger
Publication year - 2017
Publication title -
acta physica polonica. a
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.217
H-Index - 38
eISSN - 1898-794X
pISSN - 0587-4246
DOI - 10.12693/aphyspola.132.299
Subject(s) - materials science , ion , surface modification , ion beam , thin film , beam (structure) , ion beam deposition , optics , nanotechnology , physics , chemistry , quantum mechanics