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The charge transfer technique, which is capable of operating in charge accumulation-mode, is suitable for use in pH-imaging to detect small changes in potential. An advanced charge-transfer-type hydrogen ion image sensor consisting of 128<formula formulatype="inline"><tex Notation="TeX">$\,\times\,$</tex></formula>128 pixels with a 23-<formula formulatype="inline"> <tex Notation="TeX">$\mu{\rm m}$</tex></formula> pixel pitch is fabricated. A new scanning system and high-performance drive buffer circuits are adopted to achieve high frame rates. For miniaturization of the sensor pixels, we developed an advanced new fabrication process. The pH sensitivity is 32.8 mV/pH when using standard pH solutions. Videos of the movement of hydrogen ions are clearly obtained with the 128<formula formulatype="inline"><tex Notation="TeX">$\,\times\,$</tex></formula>128 pixels display, and photo images are taken simultaneously with the videos of the movement of hydrogen ions. A frame rate of 58 frames per second is realized with this image sensor.

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Fabrication of a 128<formula formulatype="inline"><tex Notation="TeX">$\,\times\,$</tex> </formula>128 Pixels Charge Transfer Type Hydrogen Ion Image Sensor

Fabrication of a 128$\,\times\,$ 128 Pixels Charge Transfer Type Hydrogen Ion Image Sensor