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We report a low-loss InP wire waveguide monolithically integrated with an SiOx waveguide on an Si platform. By means of directly bonding InP to SiO 2, we realized a submicrometer-scale InP wire waveguide with high optical confinement. In addition, a several-micrometer-scale SiOx waveguide with a refractive index difference of ~3% is integrated on the InP wire waveguide via a spot-size converter (SSC). Experimental results indicate that the InP wire waveguide has a propagation loss of 5 dB/cm and that the InP- SiOx SSC has an insertion loss of 0.7 dB and a reflectance of less than -50 dB. By using the SSC, a low coupling loss of 0.9 dB is achieved between the optical fiber and the InP wire waveguide.

ieee photonics journal

Monolithic Integration of InP Wire and <inline-formula> <tex-math notation="LaTeX">$\mbox{SiO}_x$</tex-math></inline-formula> Waveguides on Si Platform

Monolithic Integration of InP Wire and $\mbox{SiO}_x$ Waveguides on Si Platform