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Following the recent demonstration of grazing‐incidence X‐ray fluorescence (GIXRF)‐based characterization of the 3D atomic distribution of different elements and dimensional parameters of periodic nanoscale structures, this work presents a new computational scheme for the simulation of the angular‐dependent fluorescence intensities from such periodic 2D and 3D nanoscale structures. The computational scheme is based on the dynamical diffraction theory in many‐beam approximation, which allows a semi‐analytical solution to the Sherman equation to be derived in a linear‐algebraic form. The computational scheme has been used to analyze recently published GIXRF data measured on 2D Si 3 N 4  lamellar gratings, as well as on periodically structured 3D Cr nanopillars. Both the dimensional and structural parameters of these nanostructures have been reconstructed by fitting numerical simulations to the experimental GIXRF data. Obtained results show good agreement with nominal parameters used in the manufacturing of the structures, as well as with reconstructed parameters based on the previously published finite‐element‐method simulations, in the case of the Si 3 N 4  grating.

A semi‐analytical approach for the characterization of ordered 3D nanostructures using grazing‐incidence X‐ray fluorescence