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The local structural properties of representative amorphous oxides, ZnO, HfO 2 , ZrO 2 , and In 2 Ga 2 ZnO 7  were investigated by using X-ray absorption spectroscopy and an ab-initio theoretical calculation (FEFF). The X-ray absorption near-edge structures of the amorphous systems were compared with those of their crystalline counterparts, and were interpreted in terms of weakened structural orders (in the case of ZnO, HfO 2 , and In 2 Ga 2 ZnO 7 ) or fundamentally different local structures (ZrO 2 ; monoclinic-like local structure favoured in amorphous phase in contrast to the tetragonal structure in crystalline film).

X-ray Absorption Spectroscopy and Its Simulation for Some Disordered Oxide Systems