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In this paper, the PI damage caused by pulsed CO 2  laser was simulated. The theoretical model of PI damaged by pulsed CO 2  laser was established. The temperature and stress distribution in PI samples were numerically analyzed by finite element method. The simulation results show that under the condition of low incident laser energy, serious melting damage has occurred on the PI surface, and there exists thermal stress damage. The damage of PI by pulsed CO 2  laser is mainly thermal damage, and the melting phenomenon will be obvious.

Study on damage of polyimide target irradiated by Pulsed CO2 Laser