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This paper aims to study the analytical response of micro cantilever based gas sensor for the quantification of NOx gas molecules, simultaneously discussing the possibility of a different measurement technique. Numerous packed and digital gas sensors are available in the market, but each with its own limits. MEMS sensors provide smart working, portable, save space, and reusable. Hence the micro cantilever beam deposited with an active material such as palladium, reduced graphene oxide to monitor and obtain the concentration of NOx was identified in terms of deflection for deposited mass. The physics and study provided by COMSOL Multiphysics will be exploited for the current usage. Various materials such as silicon and diamond as a substrate were simulated and compared. This paper discussed about the different micro cantilever beam structures for the gas sensing mechanism and selects the better structure based on their deformation in structure due to applied mass. The excellent trapping substrate material for NOx is chosen. A new measurement technique using piezoelectric material will be discussed. The proposed method will be discussed based on their pros and cons by compared with other sensors. The drawbacks of the proposed technique are also highlighted. Overcoming the drawback of conventional measurement methodology and devising a novel sensor to make it compatible for gas sensing.

Study of toxic gas adsorption on silicon substrate integrated with piezoelectric material for sensing application using COMSOL Multiphysics