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An optical apparatus with equal-optical-path confocal imaging has been proposed for simultaneously inspecting adjacent surfaces defects of thermoelectric cooler (TEC) components. The equal-optical-path confocal imaging of two adjacent surfaces with the desired separation can be obtained by using two optical wedges in the two optical imaging paths respectively. The optical apparatus has been designed and experimental investigations on defects inspection of two adjacent surfaces of TEC components have been conducted. The results showed that the proposed optical apparatus allows one to simultaneously inspect the defects of adjacent surfaces of TEC components. It was concluded that the optical apparatus can meet the technical requirements for inspecting adjacent surfaces defects of TEC components. The apparatus has advantages of freedom for imaging adjustment, increased inspection accuracy and improved system reliability etc. It has been found applications in the intelligent defects inspection system of TEC components.

An optical apparatus for inspecting adjacent surfaces defects of TEC components with equal-optical-path confocal imaging using optical wedge prisms