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An improved model was proposed to reduce a computational cost for subcritical millimeter-wave discharge. The proposed model was able to reproduce the plasma-front propagation via radiation transport as similar to the conventional model, and the plasma-front propagation speed was in agreement with the previous simulation. An electron transport effect by neutral fluid advection, which has been introduced into the conventional model, does not affect the propagation speed. By using the presented model, a computational time was reduced by 35%, which was suitable for a multi-dimensional simulation in the future.

Plasma propagation via radiation transfer in millimeter-wave discharge under subcritical condition