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The objective of this research is to study the influence of deposition parameters such as gases mixing ratio O 2 /Ar on the structural and optical properties of the TiO 2 /SiO 2  nanocomposite films synthesized using closed field unbalanced dc magnetron co-sputtering technique. The nanocomposite thin films were characterized using x-ray diffraction (XRD) to determine the phase structure, and Fourier transform infrared (FTIR) spectroscopy to investigate Si-O-Si, Ti-O and Si–O–Ti. functional groups. The UV-VIS. absorption spectra of the synthesized films reveal that the indirect energy band gap was found to be 2.75 eV. The mixing ratio of Oxygen and Argon (O 2 /Ar) gases has a pronounced controlling effect on the structural and optical properties of such nanocomposite.

journal of physics. conference series

The Effect of Working Gases Mixing Ratios on the Synthesis and Characteristics of TiO2/SiO2 Nanocomposite via Closed-Field unbalanced DC Magnetron Co-Sputtering Technique