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Currently, there exist various materials surface analysis and characterization techniques, but it is difficult to measure their component distribution, in particular from a three-dimensional prospect. In this paper, the component distribution of nano-carbon materials in 2D and 3D views were both characterized via Time of Flight-Secondary Ion Mass Spectrometer (TOF-SIMS). The results indicate that TOF-SIMS could provide comprehensive information about component distribution, which is expected to be developed as an advanced technology in material analysis and characterization to the research community.

Component distribution of nano-carbon materials assisted by Time of Flight-Secondary Ion Mass Spectrometer