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The microstructure, mechanical and hydrophilic properties of two-layer TaN/Ta 2 O 5 coatings on stainless steel and silicon wafers were studied using atomic force microscopy (AFM), nanoindentation (NI) and sessile drop method. It was found that the two-layer films are characterized by a granular structure with low roughness values. The average values of the elastic modulus and microhardness for TaN/Ta 2 O 5  were 130 GPa and 8.7 GPa, respectively. The contact angles for the two-layer coatings were 95.1° 90.0° on the steel and silicon substrates, respectively.

Microstructure, mechanical and hydrophilic properties of two-layer nanostructured TaN/Ta2O5 coatings