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This paper presents an experimental study of structural and mechanical characteristics of thin films of AlN, GaN, and AlGaN grown on hybrid SiC/Si substrates by the method of HVPE. The surface roughness of the films and substrates has been measured. The thickness and molecular composition of the films have been determined by spectral ellipsometry. An analysis of elastic deformation occurring in the films as a result of indentation has been made. The values of hardness and Young’s modulus of the films have been calculated.

Nanoindentation of AlN, GaN, and AlGaN films grown by HVPE on SiC/Si hybrid substrates