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The paper presents the results of studying the effect of the bias voltage on the structure, texture, and residual stresses of Mo coatings deposited on a copper substrate using an inverted magnetron. It is shown that variations in the bias voltage lead to changes in the texture and thickness of the Mo coatings. It was found that an increase in the bias voltage leads to an increase in the values of the compressive residual stresses.

journal of physics. conference series

Study of the influence of bias voltage on the texture and residual stresses of Mo coatings deposited on a Cu substrate by magnetron sputtering deposition