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Microelectromechanical systems (MEMS) switches have a wide range of possible applications due to their promising working characteristics, but commercial success of these devices is limited by low reliability. In contrast with macroscopic electromechanical relays, MEMS switches typically develop a small contact force, which results in unstable and high contact resistance. In this paper we propose the design that ensures several times higher contact force in comparison with previously used structure. Enhancement of the force is achieved without increasing the footprint and operating voltage of the switch. The analytical calculation and finite element simulation of the working characteristics are performed. At the driving voltage of 100 V the modified switch provides the contact force as high as 130 µN, which is an order of magnitude higher than the force developed by the basic device.

An improved design of a seesaw-type MEMS switch for increased contact force