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Electrostatic microactuators require external DC biasing in order to achieve the widest possible range of displacements for a given AC input. This report proposes a novel microspeaker structure that utilizes a potassium-ion-electret to reduce the need for such DC voltage application. Electrets exhibiting quasi-permanent charges enable large fixed voltages to be integrated directly within the MEMS structure, acting as an  ersatz  DC bias. Prototype devices were fabricated and characterized to approximate the effects of electret incorporation on the device performance.

Low-voltage-driven electrostatic microspeakers with potassium-ion-electrets