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This paper presents the manufacturing and characterization results of biomimetic shaped thin film batteries (TFB). The final structures presented a total mass of approximately 60mg per cm² of active area, with a mean overall thickness of 100µm. Experimental results of TFB cycling at different C rates showed almost no capacity fade for current densities between 0.5 and 10mA, leading to surface energy densities as high as 0.15 mWh.cm −2  and power densities up to 5mW.cm −2 .The achieved electrochemical results are among the highest values reported in the literature for such miniaturized energy devices, which will contribute to bring new solutions for powering MEMS actuation based micro/nanorobotics.

journal of physics. conference series

Design, microfabrication and characterization of free form factor, lightweight thin film battery for powering bioinspired Nano-drones based on MEMS actuation