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This paper reports the development of a novel thin-film thermocouple structure and associated thermoelectric films for use in micro-thermoelectric generators. The proposed structure enables thermocouple length to be independent of film thickness in vertical thin-film μTEGs, allowing greater thermal resistances with thin-film designs while maintaining fill factor. In the presented structure, thermoelectric thin-films are evaporated over the sidewalls of high aspect-ratio columns. Thermocouple length is thus set by the height of the columns rather than the thickness of the deposited film. The process takes advantage of the shadowing of these columns to form N &amp; P thermocouples on the left and right side of the columns. Also reported is development of thermally co-evaporated thin films Bi 2 Te 3 /Sb 2 Te 3  onto vertical surfaces for use. Integration into proof of concept design TEG structure is briefly detailed.

Vertical Self-Defined Thin-Film Thermoelectric Thermocouples by Angled Co-Evaporation for Use in μTEGs