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It has been proved that Pt 80 Au 14 Ti 6  can give proper signals as a CO sensitive layer in air at room temperature. Unfortunately, there is no signal anymore from this sample, if it is kept in air more than 24 hours. To overcome this problem, we carried out dry etching technic. The atmosphere testing also has been done in technic etcher chamber by keeping the samples separately in Ar, N 2 , CO, and O 2  with pressure 1 atm for 24 hours without taking out the samples after etching process from the chamber. These experiments found that oxygen causes this loss signal problem. Oxygen can diffuse up to 170 Angstrom under the Pt surface to be subsurface oxygen. This diffusion changes the surface structure of Pt(100)(1x1) to hex-Pt(100) which impacts the attenuating of the initial sticking coefficient of gases. Simulations which have been conducted in this research produced the attenuating factor, i.e., 1 − 0.00585 exp (5.76664 O sub ), where  O sub  is the concentration of subsurface oxygen.

Initial Sticking Coefficient Attenuation of Gases in Carbon Monoxide Sensing on Pt80Au14Ti6