Open AccessHybrid Lithographic Arbitrary Patterning of TiO2 Nanorod Arrays
Author(s) -
Jiabao Wang,
Zhenkai Ji,
Xiaobin Xu,
Tiantian Chen,
Bo Chen,
Guohua Gao,
Jiwei Ma,
Xipeng Nie,
Xianfan Xu
Publication year - 2022
Publication title -
acs omega
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.779
H-Index - 40
ISSN - 2470-1343
DOI - 10.1021/acsomega.2c02583
Subject(s) - nanorod , materials science , lithography , hydrothermal circulation , microcontact printing , nanotechnology , soft lithography , pdms stamp , nanolithography , photolithography , optoelectronics , chemical engineering , fabrication , medicine , alternative medicine , pathology , engineering
In this work, we report a hybrid lithographic method that combines the top-down soft lithography and the bottom-up hydrothermal approach for growing single-crystalline TiO 2 nanorod arrays with arbitrary patterns. The arbitrary patterns of TiO 2 seeds were obtained through the microcontact printing of the TiO 2 seed precursor onto Si substrates using prepatterned poly(dimethylsiloxane) (PDMS) as stamps, followed by a baking process. Afterward, TiO 2 nanorod arrays were selectively grown on patterned TiO 2 seeds through conventional hydrothermal methods. By controlling the TiO 2 seed precursor concentration, the hydrothermal reaction time and temperature and the patterns, the morphology and density of the TiO 2 nanorods can be tuned in a controllable manner. Overall, this work provides a new strategy for the low-cost and facile preparation of patterned TiO 2 nanorod arrays that has potential applications in micro-nano-optoelectronic devices and other fields.