Open AccessFabrication and Materials Integration of Flexible Humidity Sensors for Emerging Applications
Author(s) -
Tugce Delipinar,
Atia Shafique,
Maryam Sepehri Gohar,
Murat Kaya Yapıcı
Publication year - 2021
Publication title -
acs omega
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.779
H-Index - 40
ISSN - 2470-1343
DOI - 10.1021/acsomega.0c06106
Subject(s) - computer science , automation , semiconductor device fabrication , process (computing) , humidity , systems engineering , nanotechnology , materials science , engineering , mechanical engineering , wafer , operating system , physics , thermodynamics
In the past decade, humidity measurements have ubiquitously gained consideration in the wide range of application paradigms such as industrial predictive maintenance, instrumentation, automation, agriculture, climate monitoring, healthcare, and semiconductor industries. Accurate humidity measurements and cost-effective fabrication processes for large-volume and high-performance sensors with flexible form factors are essential to meet the stringent performance requirements of the emerging application areas. To address this need, recent efforts focus on development of innovative sensing modalities, process technologies, and exploration and integration of new materials to enable low-cost, robust, and flexible humidity sensors with ultrahigh sensitivity and linearity, large dynamic range, low hysteresis, and fast response time. In this review paper, we present an overview of flexible humidity sensors based on distinct sensing mechanisms, employed processing techniques, and various functional sensing layers and substrate materials for specific applications. Furthermore, we present the critical device design parameters considered to be indicative of sensor performance such as relative humidity range, along with a discussion on some of the specific applications and use cases.