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XPS peak shapes accounting for the inelastic scattering of photoelectrons
Author(s) -
Végh János
Publication year - 1992
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/sia.740180715
Subject(s) - inelastic scattering , photoelectric effect , scattering , electron , inelastic neutron scattering , atomic physics , physics , x ray photoelectron spectroscopy , computational physics , nuclear physics , optics , nuclear magnetic resonance
Abstract A simple and fast method to account for inelastic scattering of photoelectrons is presented. A new peak shape class is introduced, which consists of a conventional photopeak and a tail originating from the inelastic scattering of the electrons, created originally in the photopeak. The proposed peak shapes with inelastic tail can be described using up to three additional parameters. The method has both practical and computational advantages.