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Different peak trends of tiny grains carbon film have been observed under the investigations of the Raman spectroscopy and energy loss spectroscopy. Carbon films known in nanocrystalline and ultrananocrystalline diamond films are synthesized by employing microwave‐based vapor deposition system. Carbon atoms exhibit several state behaviors depending on the incurred positions of their electrons. Different morphology of tiny grains under different chamber pressure is related to different rate of arriving typical energies at/near substrate surface. Those tiny grains of carbon film, which evolved in graphitic state atoms are converted to structure of smooth elements where elongation of atoms of one‐dimensional arrays is as per exerting surface format forces along opposite poles from their centers. Such tiny grains in the film are the cause of v 1  peak under the investigation of the Raman spectrum because of the enhanced propagation of input laser signals through channelized inter‐state electron gaps of elongated graphitic state atoms. Those tiny grains of carbon film, which evolved in fullerene state are the cause of v 2  peak. The tiny grains related to v 1  peak possess a low intensity as compared with the ones which comprised atoms having state behaviors known in their exceptional hardness. Tiny grains representing v 1  peak in the Raman spectrum are also the cause of field emission characteristic of a carbon film. Different peak recordings were made for the Raman at defined positions indicating a different state of carbon atoms for a different phase of deposited tiny grains, which is in line to their energy loss spectroscopy.

Phase transitions and critical phenomena of tiny grains carbon films synthesized in microwave‐based vapor deposition system