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A porous silicon based particle filter for microsystems
Author(s) -
Wallner J. Z.,
Bergstrom P. L.
Publication year - 2007
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200674387
Subject(s) - porous silicon , filtration (mathematics) , microsystem , pressure drop , materials science , porosity , silicon , particle (ecology) , membrane , filter (signal processing) , particle size , chemical engineering , nanotechnology , composite material , optoelectronics , chemistry , engineering , mechanics , electrical engineering , physics , mathematics , biochemistry , statistics , oceanography , geology
Abstract A porous silicon (PS) based particle filter has been fabricated and tested for integrated microsystems. By engineering the morphology of the porous silicon membrane, depth filtration with high collection efficiency in the submicron range (0.3∼1 μm), low pressure‐drop, and large filtration capacity (0.5 mg/cm 2 ) has been demonstrated. With the PS particle filter, on‐board gas filtration can be achieved. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)