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Frequency Scaling Laws of Plasma Bulk in Atmospheric Radio Frequency Discharges
Author(s) -
Zhang Yuantao T.,
Shang Wanli
Publication year - 2012
Publication title -
plasma processes and polymers
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.644
H-Index - 74
eISSN - 1612-8869
pISSN - 1612-8850
DOI - 10.1002/ppap.201000133
Subject(s) - excitation , frequency scaling , electron density , radio frequency , scaling , computational physics , scaling law , plasma , electron , relaxation (psychology) , atomic physics , materials science , physics , voltage , electrical engineering , mathematics , quantum mechanics , engineering , geometry , psychology , social psychology
Abstract In this paper a modelling study is performed to investigate the frequency scaling laws in atmospheric radio frequency discharges. By introducing the relaxation frequency of discharge plasmas, which links the electron density and excitation frequency, the relationships between excitation frequency and other discharge parameters, such as electron density, current density and sheath thickness, are revealed based on the analytical equations deduced from the model and then confirmed by the computational data. These scalings are effective to give insights into some discharge parameters which are not easily accessible in experiments such as electron density.