Open AccessCalcium Fluoride and Barium Fluoride Crystals in Optics
Author(s) -
Hahn Daniel
Publication year - 2014
Publication title -
optik & photonik
Language(s) - English
Resource type - Journals
eISSN - 2191-1975
pISSN - 1863-1460
DOI - 10.1002/opph.201400066
Subject(s) - barium fluoride , materials science , fluorite , fluoride , magnesium fluoride , optoelectronics , ultraviolet , optics , transmittance , barium , infrared , wavelength , calcium , chemistry , nanotechnology , layer (electronics) , inorganic chemistry , physics , nuclear physics , metallurgy
Abstract Calcium fluoride has a long tradition as an optical material in microlithography for semiconductor production. Based on the limited choice of optical materials transmitting well in the deep UV wavelength range, calcium fluoride could establish as an industry standard material for excimer laser optics in projection and illumination optical designs for the microlithography process. But beyond the UV, calcium fluoride and barium fluoride crystals also exhibit an excellent broadband transmittance and feature unique optical properties. These open up a variety of advanced applications covering the full visible range up to the mid‐infrared wavelength range.