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We have investigated ten standard single crystal substrates of complex oxides on the account of their applicability in the Raman spectroscopy‐based thin film research. In this study, we suggest a spectra normalization procedure that utilizes a comparison of the substrate's Raman spectra to those of well‐established Raman reference materials. We demonstrate that MgO, LaGaO 3 , (LaAlO 3 ) 0.3 (Sr 2 AlTaO 6 ) 0.7  (LSAT), DyScO 3 , YAlO 3 , and LaAlO 3  can be of potential use for Raman‐based thin film research. At the same time TiO 2  (rutile), NdGaO 3 , SrLaAlO 4 , and SrTiO 3  single crystals exhibit multiple phonon modes accompanied by strong Raman background that substantially hinder Raman‐based thin film experiments. Copyright © 2014 John Wiley & Sons, Ltd.

Thin film substrates from the Raman spectroscopy point of view