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On the Quantitative Treatment of the Growth Rate of Thin Polymer Films Produced in Glow Discharges
Author(s) -
Deutsch H.,
Schmidt M.
Publication year - 1981
Publication title -
beiträge aus der plasmaphysik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.531
H-Index - 47
eISSN - 1521-3986
pISSN - 0005-8025
DOI - 10.1002/ctpp.19810210405
Subject(s) - plasma , polymer , thin film , plasma polymerization , polymerization , materials science , volume (thermodynamics) , polymer chemistry , chemistry , chemical engineering , thermodynamics , nanotechnology , composite material , nuclear physics , physics , engineering
Abstract An extensive system of equations is derived to determine the growth rate of thin polymer films induced by an anisothermic plasma taking into account activation reactions as well as transport processes in the plasma volume and surface reactions. A survey of the literature on the quantitative treatment of plasma polymerization is given.