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Benzenedisulfonic Acid as an ALD/MLD Building Block for Crystalline Metal‐Organic Thin Films **
Author(s) -
Heiska Juho,
Sorsa Olli,
Kallio Tanja,
Karppinen Maarit
Publication year - 2021
Publication title -
chemistry – a european journal
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.687
H-Index - 242
eISSN - 1521-3765
pISSN - 0947-6539
DOI - 10.1002/chem.202100538
Subject(s) - materials science , thin film , metal , polymer , chemical engineering , crystal structure , layer (electronics) , conductivity , ionic conductivity , ionic bonding , atomic layer deposition , ion , inorganic chemistry , composite material , crystallography , nanotechnology , metallurgy , organic chemistry , chemistry , electrode , electrolyte , engineering
Two new atomic/molecular layer deposition processes for depositing crystalline metal‐organic thin films, built from 1,4‐benzenedisulfonate (BDS) as the organic linker and Cu or Li as the metal node, are reported. The processes yield in‐situ crystalline but hydrated Cu‐BDS and Li‐BDS films; in the former case, the crystal structure is of a previously known metal‐organic‐framework‐like structure, while in the latter case not known from previous studies. Both hydrated materials can be readily dried to obtain the crystalline unhydrated phases. The stability and the ionic conductivity of the unhydrated Li‐BDS films were characterized to assess their applicability as a thin film solid polymer Li‐ion conductor.