Premium
Enhanced Optical Transmission through MacEtch‐Fabricated Buried Metal Gratings
Author(s) -
Liu Runyu,
Zhao Xiang,
Roberts Christopher,
Yu Lan,
Mohseni Parsian K.,
Li Xiuling,
Podolskiy Viktor,
Wasserman Daniel
Publication year - 2016
Publication title -
advanced materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.707
H-Index - 527
eISSN - 1521-4095
pISSN - 0935-9648
DOI - 10.1002/adma.201505111
Subject(s) - materials science , semiconductor , optoelectronics , metal , transmission (telecommunications) , electrical contacts , coupling (piping) , extraordinary optical transmission , optics , nanotechnology , surface plasmon , plasmon , composite material , surface plasmon polariton , physics , electrical engineering , metallurgy , engineering
Metallic films with subwavelength apertures , integrated into a semiconductor by metal‐assisted chemical etch (MacEtch), demonstrate enhanced transmission when compared to bare semiconductor surfaces. The resulting “buried” metallic structures are characterized spectroscopically and modeled using rigorous coupled wave analysis. These composite materials offer potential integration with optoelectronic devices, for simultaneous near‐uniform electrical contact and strong optical coupling to free space.