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A programmable micromechanical resonator  based on a VO 2  thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO 2  around its Metal‐Insulator transition temperature. Phase coexistence of domains is used to tune the stiffness of the device via local control of internal stresses and mechanical properties. This study opens perspectives for developing mechanically configurable nanostructure arrays.

Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials