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Abstract  Suspended micro‐structures made of epitaxial complex oxides rely on surface micro‐machining processes based on sacrificial layers. These processes prevent to physically access the microstructures from both sides, as substantial part of the substrate is not removed. In this work, a bulk micromachining protocol is developed for a commonly used substrate employed in oxide thin films deposition. Suspended oxide thin film devices are realized by fabricating pass‐through holes across SrTiO 3 (100) or SrTiO 3 (110) substrates. Careful calibration of anisotropic etching rates allows controlling the final geometry of the aperture in the substrate in a predictable way. As demonstrators of possible device geometries, clamped membranes and trampolines realized from deposited thin films of (La,Sr)MnO 3 , a conductive magnetic oxide, and a suspended trampoline resonator carved from the SrTiO 3  substrate itself are presented. Reported protocols can be readily applied to a broad variety of other complex oxides so to extend the use of membranes technology beyond those of commercially available silicon compounds.

Oxide Membranes from Bulk Micro‐Machining of SrTiO 3 Substrates