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In this study, we proposed a design methodology for a piezoelectricenergy-harvesting device optimized for maximal power generation at a designatedfrequency using topology optimization. The proposed methodology emphasizes thedesign of a unimorph-type piezoelectric energy harvester, wherein apiezoelectric film is affixed to a singular side of a silicon cantilever beam.Both the substrate and the piezoelectric film components underwent concurrentoptimization. Constraints were imposed to ensure that the resultant design isamenable to microfabrication, with specific emphasis on the etchability ofpiezoelectric energy harvesters. Several numerical examples were provided tovalidate the efficacy of the proposed method. The results showed that theproposed method derives both the substrate and piezoelectric designs thatmaximize the electromechanical coupling coefficient and allows theeigenfrequency of the device and minimum output voltage to be set to thedesired values. Furthermore, the proposed method can provide solutions thatsatisfy the cross-sectional shape, substrate-depend, and minimum output voltageconstraints. The solutions obtained by the proposed method are manufacturablein the field of microfabrication.

Optimal design of unimorph-type cantilevered piezoelectric energy  harvesters using level set-based topology optimization by considering  manufacturability