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Three-dimensional reconstruction of atomic structure, known as atomicelectron tomography (AET), has found increasing applications in materialsscience. The AET has been limited to very small nanoparticles due to thechallenges of obtaining accurate atomic positions for large objects, for whichthe projection approximation generally assumed in AET is no longer valid due tothe evolution of the electron probe along the beam direction. To address thesechallenges, we have developed a method that represents atoms as local orbitalsand implements a depth-dependent probe-object interaction. Compared toconventional tomographic methods, the accuracy of atomic positions is improvedby a factor of three and provides a solution for the tomographic reconstructionof large objects.

Accurate atomic positions via local-orbital tomography with depth-dependent interactions