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We report on a first implementation of a piezoresistive interrogation in abifurcation-based airflow velocity sensor. The affected by the flowsnap-through transitions in a bistable double-clamped microbeam serving as asensing element are detected by measuring the resistivity changes in an entirebeam. The flow velocity is then extracted by monitoring the critical voltages.Piezoresistive sensing is especially suitable for the responses monitoring ofthe exposed to the environment, free-standing heated microbeam sensor, whereoptical, piezoelectric, or electrostatic interrogation methods are notapplicable. Our digital sensor has lower power consumption and highersensitivity~3 V/m/s, than the typical analog hot-wire micro anemometers. Ourresults indicate that the suggested approach is a promising reliable method fora flow sensor.

Bistable microbeam-based air flow sensor with piezoresistive snap-through detection