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Magnetoelastic composites are integral elements of sensors and actuatorsutilizing magnetostriction for their functionality. Their sensitivity typicallyscales with the saturation magnetostriction and inversely with magneticanisotropy. However, this makes the devices prone to minuscule residualanisotropic stress from the fabrication process, impairing their performanceand reproducibility, hence limiting their suitability for arrays. This studypresents a shadow mask deposition technology combined with a free-freemagnetoelectric microresonator design intended to minimize residual stress andinhomogeneity in the magnetoelastic layer. Resonators are experimentally andtheoretically analyzed regarding local stress anisotropy, magnetic anisotropy,and the {\Delta}E effect in several resonance modes. Further, the sensitivityis analyzed in the example of {\Delta}E-effect sensors. The results demonstratea device-to-device variation of the resonance frequency < 0.2 % withsensitivities comparable with macroscopic {\Delta}E-effect sensors. Thereproducibility is drastically improved over previous magnetoelastic devicearrays. This development marks a step forward in the reproducibility andhomogeneity of magnetoelastic resonators and contributes to the feasibility oflarge-scale, integrated sensor arrays.

Miniaturized Double-Wing Delta-E Effect Sensors